AERZEN canned motor vacuum blowers are positive displacement blowers with a hermetically sealed drive, made for oil-free conveyance of air, neutral, or aggressive gases in industrial high vacuum applications. The range covers volume flows from 406 to 15,570 m³/h and vacuum levels down to 10^-5 mbar, with options for vertical or horizontal flow direction.

  • Oil-free vacuum blower for air, neutral, or aggressive gases in high vacuum settings

  • Hermetically sealed drive prevents gas leakage

  • Four motor variants and ten sizes for flexible selection

  • Reduces pump down times for improved process efficiency

  • Suitable for clean room environments

  • Air-cooled with O-ring and labyrinth seals for vacuum tightness

  • Low nitrogen and water consumption

Applications

  • Semiconductor manufacturing

  • Micro-electronics

  • Flat screen production

  • Laser and solar technology

  • Chemical process technology

  • Foil and glass coating

  • Melting furnace manufacture

  • Hydrogen evacuation

Performance

Volume flow 406 to 15,570 m³/h

Vacuum 10^-5 to 0 mbar

Maximum pressure difference up to 230 mbar (HM series)

Materials

Mineral oil or PFPE oil for lubrication

Options and variations

Ten sizes, four motor variants, vertical or horizontal flow direction